교원소개

나노소자 공정 연구실은 원자층 증착법 (atomic layer deposition, ALD)과 영역 선택 원자층 증착법 (Area-selective ALD)에 대한 연구를 바탕으로 차세대 배선 공정/소재에 대한 연구를 수행하고 있습니다. 또한, 원자층 증착법을 이용한 나노 소재의 기능화에 대한 연구를 수행하고 있으며, 이러한 기능화된 나노 소재를 에너지 변환, 에너지 저장, 웨어러블 센서등으로의 적용 가능성을 탐색하고 있습니다.

 

– Curriculum Vitae

• 2022.12 – Present: Professor, Graduate School of Semiconductor Materials and Devices Engineering
• 2007.03 – 2022.11: Professor, Yeungnam University
• 2019.03 – 2020.02 : Consulting Professor, SK Hynix Semiconductor
• 2012.09 – 2013.05 : Visiting Professor,  Harvard University, USA.
• 2003.02 – 2007.02 : Senior Researcher, R & D Division, Hynix Semiconductor 

– Academic Credential

• 2003: Ph.D., Materials Science and Engineering, Seoul National University
• 1999: M.S., Metallurgical Engineering, Seoul National University
• 1997: B.S., Metallurgical Engineering, Seoul National University

– Research  Keywords and Topics

    Semiconductor Devices and Process,  Atomic Layer Deposition (ALD), Area-selective Atomic Layer Deposition, Metallization, Synthesis of Functional Nanomaterials via ALD

 

– Publications (selected)   

• “Process Controlled Ruthenium on 2D Engineered V-MXene via Atomic Layer Deposition for Human Healthcare Monitoring” Advanced Science (2023) 2206355

•  “Atomically dispersed iridium catalysts on silicon photoanode for efficient photoelectrochemical water splitting” Nature Communications (2023) 14, 609, 9, 2104938

• “Atomic Layer Deposited RuO2 Diffusion Barrier for Next Generation Ru-Interconnects” Advanced Functional Materials (2022) 32, 2206667

• “Atomic Layer Deposition of Iridium Using a Tricarbonyl Cyclopropenyl Precursor and Oxygen”, ” Chemistry of Materials (2022), 34, 1533−1543 (selected as a front cover)

• “Atomic Layer Deposition of Ru for Replacing Cu-interconnects” Chemistry of Materials (2021), 33, 5639−5651

 

– Awards/Honors/Memberships

• General Co-Chair, 2023, 2020, 2017 International Interconnect Technology (IITC) Conference 
• Program Co-Chair, 2021 International Interconnect Technology (IITC) Conference 
• Asian Committee Member, International Interconnect Technology Conference (IITC) (2014/01 – )