Advanced Microfabrication of Bio-Inspired 3D Structures and Their Applications
Advanced Microfabrication of Bio-Inspired 3D Structures and Their Applications Hyunsik Yoon Seoul National University of Science and Technology (hsyoon@seoultech.ac.kr) Microfabrication of polymeric materials has been used to form micro- and nanoscale lines and blocks in semiconductor chips or display panels. For semiconductor industries, photolithography, which uses the chemical change...
